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We hold in stock thousands of spare parts for machinery used in
the semiconductor, optical and opthalmic manufacturing industries.
Balzers BGD Series

  Click here for an explanation of the abbreviations used in the Balzers pages  
BG D02 764 IMG040 Automatic Ion Gauge Control Photo of BGD02764
BG D02 770 IMG040 Automatic Ion Gauge Control Photo of BGD02770
BG D03 350 IKG 010 Photo of BGD03350
BG D04 509 High Vac. Relay IKW010 Photo of BGD04509
BG D04 512 IKW 010, High Vaccum Relay IKW010, 230V Photo of BGD04512
BG D04 768 IMG 060B Log/Lin Ion Gauge Control IMG060 IMG060B Photo of BGD04768
BG D06 256 PKG 020 Pirani-cold cathode gauge control, PKG020 Photo of BGD06256
BG D06 502 VWS 110 Relay Driver (VWS110) Photo of BGD06502
BG D13 500 Multi pirani meter TPG 070 Photo of BGD13500
BG D13 505 TPG 070 Multi Pirani meter Photo of BGD13505
BG D13 750 Display Terminal EDT101 Photo of BGD13750
BG D14 250 VWS 120, Vacuum Controller VWS120, 220V, 50-60Hz, 20W Photo of BGD14250
BG D14 256 VWS 120, Vacuum Controller VWS120 Photo of BGD14256
BG D15 750 IMG070 Ion Gauge Controller Photo of BGD15750
BG D15 751 Ion Gauge Control IMG 070 Photo of BGD15751
BG D15 753 Ion Gauge Control IMG 070 Photo of BGD15753
BG D15 763 Ion Gauge Control IMG 070 Photo of BGD15763
BG D15 766 Ion Gauge Control IMG 070, 220V, 50-60Hz Photo of BGD15766
BG D16 008 Multi Pirani Meter TPG 100 M4, 220V, 50-60Hz, 40VA Photo of BGD16008
BG D16 008 A Multi Pirani Meter TPG 100 M4, 220V, 50-60Hz, 40VA Photo of BGD16008A
BG D16 015 Multi Pirani Meter TPG 100 Ring for information.
BG D17 000 Pirani Cold Cathode gauge Control PKG 100 Photo of BGD17000
BG D17 013 PKG 100 Pirani Cold Cathode Gauge Control S/N: 524 Photo of BGD17013
BG D19 001 A ETD 101 Temp. Display Photo of BGD19001A
BG D20 500 Absolute Pressure Meter, APG 100 Photo of BGD20500
BG D21 250 QMG 064 Partial Pressure Gauge, 220V, 180W Photo of BGD21250
BG D21 254 QMG 064 Partial Pressure Gauge, 220V, 180W Photo of BGD21254
BG D21 260 QMG 064 Partial Pressure Gauge, 220V, 180W Photo of BGD21260
BG D21 262 QMG 064 Partial Pressure Gauge, 220V, 180W Photo of BGD21262
BG D22 500 ECD 101 current display Photo of BGD22500
BG D22 750 ECD 201 Current Display, 220V, 50-60Hz, 20W Photo of BGD22750
BG D24 750 Rekorder 24 Kanel Photo of BGD24750
BG D24 752 PCB PCB, 420 3.25" floppy disc interface board, unpopulated. Photo of BGD24752PCB
BG D25 257 TPG 300 Total Pressure Controller, TPG300 Photo of BGD25257
BG D25 258 TPG300 Total Pressure Controller Photo of BGD25258
BG D25 750 Multi Gauge IMG 300 (IMG300) Photo of BGD25750
BG D25 757 Multi Gauge IMG 300 (IMG300) Just In: Photo on request.
BG D26 563 QMG 421 C, 180-265V, 50-60Hz, 480W, (including - QC421, DI420, DO420, OH421) Photo of BGD26563
BG D27 260 QMI 421, 230V, 50-60Hz, 440W Photo of BGD27260
BG D28 000 TPG 251 Compact Gauge Control Unit Photo of BGD28000
BG D28 250 TPG 252 Compact Gauge Control Unit Photo of BGD28250
BG D28 504 Balzers Prisma QME 200 RGA Electronic Box Photo of BGD28504
BG D41 315 G MFU 410 Photo of BGD41315G
BG G01 503 IMR 110 Gauge Head Complete (See IGH110IKR) Photo of BGG01503
BG G01 753 IMR 120 Photo of BGG01753
BG G02 250 TPR 010 Gauge Head with Octal Connector Photo of BGG02250
BG G02 251 TPR 010 Replacement Gauge Head Photo of BGG02251
BG G02 270 TPR 010 Gauge Head with Socket Connector Photo of BGG02270
BG G04 502 HV 5 Photo of BGG04502
BG G04 502 A HV5 Exchange Photo of BGG04502A
BG G05 512 crystal holder QSK300.A Photo of BGG05512
BG G07 751 Light Source for Optical Monitor, WLL 201, WLL201 Photo of BGG07751
BG G10 250 QSK 610 Ring for information.
BG G12 500 IKR 020 Photo of BGG12500
BG G12 510 IKR020 Penning Gauge, IKR 020 Photo of BGG12510
BG G12 530 IKR020 Penning Gauge High Voltage Ring for information.
BG G12 532 IKR 020 Connector Photo of BGG12532
BG G13 814 Optical monitor,CAGE, R3-S7 BAP 800 Just In: Photo on request.
BG G14 314 Optical monitor light source, RS-S7/GLS-401-A Photo of BGG14314
BG G15 000 TPR 018 S/N 1328 Photo of BGG15000
BG G15 001 TPR 018 CF Photo of BGG15001
BG G15 014 Pirani Gauge Head TPR 018 40 CF Photo of BGG15014
BG G18 500 Gauge, Penning IKR050, ISO 25KF Photo of BGG18500
BG G18 501 Gauge, Penning IKR050, ISO 40KF Photo of BGG18501
BG G19 250 Compact pirani gauge TPR250 Ring for information.
BG G25 501 Cold Cathode Gauge IKR251 Ring for information.
BG G26 001 Gauge Head, PKR251 Photo of BGG26001
BG M03 253 IRU 101, IR accesory unit Photo of BGM03253
BG M03 500 WLE 301, IR Reciever Photo of BGM03500
BG M04 313 TCO 101 (TC 101, AC 101, AM 101, AM 103) Photo of BGM04313
BG M04 759 Module, BSF 20, Feeder control Photo of BGM04759
BG M05 504 RVG 030, Valve control unit Photo of BGM05504
BG M06 500 NLC 102 Nitrogen level control Photo of BGM06500
BG M06 520 NLC 102 B Nitrogen level control, 220V, 60 Hz, 6W Photo of BGM06520
BG M06 523 NLC 102A NLC 102B Nitrogen Level Control Photo of BGM06523
BG M06 752 High Voltage Relay, EHU 103 Just In: Photo on request.
BG M08 313 Partial Pressure Gauge Controller, QME 064 Photo of BGM08313
BG M08 813 Microcomputer system, MCS 111 Just In: Photo on request.
BG M09 063 FPS100 Filament Power Supply Photo of BGM09063
BG M09 750 Module, BSM 103 (BSM103) Meissner Trap Control Just In: Photo on request.
BG M09 751 Module, BSM 103 (BSM103) Meissner Trap Control Photo of BGM09751
BG M10 001 Module, BSD 104, Rotary cage control Photo of BGM10001
BG M11 000 BCS 101- Chopper supply Photo of BGM11000
BG M12 500 RVG040 (RVG 040) Valve Controller, 220V Photo of BGM12500
BG M12 504 RVG040 (RVG 040) Valve Controller, 220V Photo of BGM12504
BG M12 505 RVG040 (RVG 040) Valve Controller, 220V Photo of BGM12505
BG M12 813 Power supply, Radio Frequency, RFS 102 Photo of BGM12813
BG M12 818 Power supply, Radio Frequency, RFS 102 (RFS102) Photo of BGM12818
BG M13 067 TKU 401 Temperature Control Unit Photo of BGM13067
BG M14 001 Module, BSD 201A rotary cage control Photo of BGM14001
BG M14 313 Temperature Measuring Unit TMU 100 Photo of BGM14313
BG M14 564 TMU 110, Temperature Measuring Unit, 220V, 50-60Hz, 15W Photo of BGM14564
BG M18 002 Temperature Control Unit, TKU 201A (TKU201A) 19" Rack mounting Photo of BGM18002
BG M18 567 Temperature Measuring Unit TMU120 Photo of BGM18567
BG M21 270 BPU 100 - ECU 101 Card frame Just In: Photo on request.
BG M21 279 ECU101 Just In: Photo on request.
BG M21 501 Module, BST 102 Test Change Control Photo of BGM21501
BG M21 541 Module, BST 102 Just In: Photo on request.
BG M22 001 Rate Monitor QRG 201 C Just In: Photo on request.
BG M22 750 A ETS110 ETS 110, Crucible Position Controller Photo of BGM22750A
BG M22 813 Assembly, 19" rack mounting with PSU for 200 series modules EVS200 Photo of BGM22813
BG M23 314 CON 700 Just In: Photo on request.
BG M25 813 GIU 100 GIU100 Gas Injection Unit Photo of BGM25813
BG M28 814 TKU410 TKU 410 Heater Control Photo of BGM28814
BG M29 000 Power supply for BPU100 system, 50-60Hz, 220V, EPS101 EPS 101 Photo of BGM29000
BG M29 003 Power supply for BPU100 system, 50-60Hz, 220V, EPS101 EPS 101 Photo of BGM29003
BG M31 250 TFN 010, 220V, 50/60Hz, 15W Photo of BGM31250
BG M31 563 RF Power Supply, RFS 300, 3x380V Photo of BGM31563
BG M31 752 Electron Gun Control EKS110A Photo of BGM31752
BG M31 813 RFC200 Unit, Tuning Controller, 220v, 50-60Hz Photo of BGM31813
BG M33 313 Shutter Control Unit SSC 301 Photo of BGM33313
BG M34 005 BPU 100 - ECU 201 empty Just In: Photo on request.
BG M34 006 ECU 201 (EPS 101, QM 101, OU 101, BL 101) Just In: Photo on request.
BG M34 750 EFS 110, Remote Control, Crucible Drive Photo of BGM34750
BG M34 813 GPS 400 Photo of BGM34813
BG M36 250 Module, BSZ 105- TIMER Photo of BGM36250
BG M37 250 DPA 201, Pumping Unit Control, 220V, 50Hz, 100W Photo of BGM37250
BG M39 015 ETR101 s/n 205 Just In: Photo on request.
BG M39 017 ETR101 frame with switch Just In: Photo on request.
BG M41 250 Adaptor, BPU/BSV, BVA 101 (BVA101) Just In: Photo on request.
BG M42 251 Adaptor QSR/EDU QSA 101 (QSA1010) Just In: Photo on request.
BG M42 252 Adaptor QSR/EDU QSA 101 (QSA1010) Just In: Photo on request.
BG M42 753 Start Unit, ESU 101 (ESU101) Photo of BGM42753
BG M42 754 ESU 101 Start unit Photo of BGM42754
BG M42 759 ESU 101 start unit Just In: Photo on request.
BG M43 500 ETI 101 Just In: Photo on request.
BG M44 751 EEU 301, 3x220/380V 60Hz Photo of BGM44751
BG M45 813 A EEC 300 (EEC300) Photo of BGM45813A
BG M46 000 Throttle valve controller RVG 060 Photo of BGM46000
BG M46 501 EEU 401 emergency cutout s/n175 Just In: Photo on request.
BG M48 264 High Voltage Unit HGG 700, HGG700 Photo of BGM48264
BG M50 751 Throttling Control TCU 102 Photo of BGM50751
BG M52 000 Magnetron Switching unit MSU101 Photo of BGM52000
BG M54 500 EEO101 Emergency Stop s/n192 Photo of BGM54500
BG M57 250 ESP 201 Set Point Unit. Photo of BGM57250
BG M58 010 QCC101 Quartz change control, QCC 101 Photo of BGM58010
BG M58 262 RGA, QMA 120 inc. TPC 040, VAT and QME112 Just In: Photo on request.
BG M59 000 Magnetron Control Unit, MCU 110 Just In: Photo on request.
BG M60 750 Module, BSD 105, Rotary Cage Control Photo of BGM60750
BG M61 001 Meissner Trap Control, 220V, 50-60Hz, 200VA, BSM 104 Photo of BGM61001
BG M63 250 EPG 101 (sn 160) Photo of BGM63250
BG M65 013 Electron Beam High Voltage Supply, HVS 107, (3x 380/220V, 50Hz, 11000kW) Ring for information.
BG M66 500 RTA 101 Rate time adder Photo of BGM66500
BG M69 500 Disconnect Switch Unit, EDS 100, (3x380/220V, 50Hz) Just In: Photo on request.
BG M69 750 Electrometer Amplifier, QME 311 (220V, 50-60Hz, 10W) Photo of BGM69750
BG M70 000 Shutter control unit SSC 101 SSC101 Photo of BGM70000
BG M74 500 RG 101 Power Generator sn101 Photo of BGM74500
BG M77 001 RFS102 19" card frame s/n72 Photo of BGM77001
BG S02 254 Quartz Crystal Thin Film Monitor, QSG 201 C Just In: Photo on request.
BG S02 754 QSB 101 (EPS 101, MC 101, KB 101, IU 201, QM 101, OU 101, DA 101, BL 101) Just In: Photo on request.
BG S03 250 OSM 101 Optical Thin Film Monitor Photo of BGS03250
BG S04 250 QSG 301 Quartz crystal thickness Monitor Photo of BGS04250
BG510 306AS PCB Ring for information.
BG 510 959 - X Anode for IKR020 Photo of BG510959X
BG524 165 Disk for QSK610a Ring for information.
BG 524 182 Disk QSK610 Photo of BG524182
BG 526 335 --T Pump controller PC 101 Photo of BG526335T
BG 526 335 -WA Pump controller PC 101 Photo of BG526335WA
BG 527 066 -T/E PCB, LN2 Photo of BG527066TE
BG 531 820 -X Thermocouple DN 10KF 1.0m Photo of BG531820X
BG 572 905 -T NC200 NC 200 Control Module Photo of BG572905T
BG D25 258 TPG300 Total Pressure Controller Photo of BGD25258
BGM 29 563 Process Unit, EPU 101 Just In: Photo on request.
BGM 75 500 / 0133 Sublimation pump control USS 110 (USS110) Photo of BGM755000133
BG M64 250 - / 104 LSC 15/02/1110 Longitudinal Sweep Control s/n104 Photo of BGM64250104
BHT-770-T Dish and plate for base, Stainless Steal Photo of BHT770T
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